Growth of diamond thin films in a cyclic growth–etch oxy-acetylene flame process
作者： R Kapil , B.R Mehta , V.D Vankar , C Roy , A Pradhan
DOI: 10.1016/S0040-6090(97)00960-7
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摘要: Abstract Diamond thin films have been grown using a cyclic growth–etch oxy-acetylene flame process on Si, W and Mo substrates. This resulted into the growth of cubic diamond, 8H 15R polytypes diamond. The results suggest that diamond grows with formation intermediate low-symmetry polytypes. Glancing angle X-ray diffraction (XRD) micro Raman spectroscopy techniques used to characterize these films. relative various found be strong function acetylene oxygen flow ratio, speed rotation substrate materials.
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