Atomic excitation in electron- and ion-induced sputtering of alkali halides
作者： Z. Postawa , J. Rutkowski , A. Poradzisz , P. Czuba , M. Szymonski
DOI: 10.1016/S0168-583X(86)80091-X
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摘要: In this work we present a systematic study of the atomic excitation processes stimulated either by ion or electron bombardment NaCl- CsCl-type halides. Spectra and intensities discrete lines emitted sputtered alkali atoms have been measured as function beam mass, its energy, target temperature distance from surface. particular, found that radiation extends to surprisingly large distances bombarded surface The results are discussed in terms relevant sputtering mechanisms responsible for halide erosion. It is suggested particles takes place at final collision cascade, while most observed case originates gas-phase collisions above
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