作者: Katsuhide Misono , Masashi Kando , Joseph T. Verdeyen
DOI: 10.1143/JJAP.38.231
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摘要: We have developed a method to measure plasma parameters in discharge by analyzing the impedance of search coil wound around tube. This technique is based on diamagnetic characteristic plasma. When high-frequency current passes through coil, induced inside plasma, and energy dissipated Joule loss due resistivity As result, varies depending properties. The relationship among parameters, magnetic field derived from Maxwell's equations generalized Ohm's law. Thus, can be determined variation impedance. present diagnostic was applied electron density temperature mercury-argon at pressure 2.5 Torr.