Effect of Stators Geometry on the Resonance Sensitivity of Capacitive MEMS
作者： Frangi , G. Laghi , P. Minotti , G. Langfelder
DOI: 10.1016/J.PROENG.2015.08.619
关键词:
摘要: Abstract The work investigates alternative capacitive sensing topologies for microelectromechanical systems, that simultaneously enable large quasi-stationary sensitivity, comparable to parallel-plates configuration, and quality (Q) factor. In agreement with the model predictions, about 3-fold larger Q factor 2-fold resonant sensitivity are obtained on optimized geometry.
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sci-hub.se 参考文章(7)
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