Pull-in time–energy product of electrostatic actuators: comparison of experiments with simulation

摘要: Measurements of voltage and current transients a scaled model an electrostatic microactuator have been performed. Experiments were made at variety values the actuation source resistance, effects on pull-in time energy consumed in switching event analysed. It is concluded that remains sensibly constant until resistance are reached corresponding more closely to current-controlled than voltage-controlled actuation. Furthermore, per monotonically decreases with increasing resistance. There optimum which minimum can be found for product agreement earlier theoretical predictions. The experimental results quantitatively compared Saber simulations incorporating analog hardware description language actuator.