Enhancement of fluorine doped amorphous carbon thin films from microwave surface wave plasma activated above room temperature

作者: Dilip Chandra Ghimire , Sudip Adhikari , Hare Ram Aryal , Golap Kalita , Masayoshi Umeno

DOI: 10.1016/J.DIAMOND.2008.10.006

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摘要: Abstract Fluorinated amorphous carbon (a-C:F) thin films were synthesized above room temperature by microwave surface wave plasma chemical vapour deposition (MW SWP CVD). The effect of on optical, electrical, and bonding properties the a-C:F studied ultraviolet–visible spectroscopy (UV–VIS), Fourier transform infrared (FTIR), X-ray photoelectron spectrometry (XPS), Raman TEM measurements. film exhibits high transparency decrease in optical band gap with increasing temperature. FTIR study shows increase C C–Fx bonds some important structural changes due to fluorine incorporation. XPS result shift peak higher binding energy link films. graphitic layer

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