Method of fabricating thin film transistor using buffer layer and the thin film transistor
作者： Sang Wook Lee , In Keun Woo , Jin Jang
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摘要: In the method of fabricating a thin film transistor, first aluminum layer, which is later oxidized, or nitride layer formed on glass substrate. A metal gate layer. Oxidation carried either prior to after forming gate. transistor structure that includes then over
lens.org 参考文章(1)
Scott H. Holmberg, Rajesh Swaminathan, Performance matrix, method of making an active matrix displays incorporating an improved TFT ,(1998)