Accuracy of the non‐destructive surface nanostructure quantification technique based on analysis of the XPS or AES peak shape
作者： S. Tougaard
DOI: 10.1002/(SICI)1096-9918(199804)26:4<249::AID-SIA368>3.0.CO;2-A
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摘要: … be to improve spectral analysis of XPS and AES such that it … no improvements in the accuracy of XPS and AES even if we … Rather than using the O 1s peak in the analysis of this particu…
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