Nickel ion implantation effects on DC magnetron sputtered ZnO film prepared on Si (100)
作者： Rabia Younas , Naveed Afzal , Mohsin Rafique , M Imran , Murtaza Saleem
DOI: 10.1016/J.CERAMINT.2019.05.060
关键词:
摘要: … , 1.8 × 10 13 , 5.6 × 10 13 and 1.1 × 10 14 ions/cm 2 by Pelletron Accelrator. The ZnO films were … The Ni + implantation in ZnO up to 1.8 × 10 13 ions/cm 2 caused a decrease in the film's …
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