Spatial distribution of backscattered electrons in the scanning electron microscope and electron microprobe
作者： Kenji Murata
DOI: 10.1063/1.1663920
关键词:
摘要: … to the electron scattering theory in scanning electron microscopy. … The surface distribution of backscattered electrons is … From these results the exit areas of the backscattered electrons …
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sci-hub.se 参考文章(9)
竹男 市ノ川, 和武 高良, G. Shinoda, Proceedings of the Sixth International Conference on X-ray optics and microanalysis Univ. Tokyo Press. ,(1972)
D. F. Kyser, K. Murata, Quantitative electron microprobe analysis of thin films on substrates Ibm Journal of Research and Development. ,vol. 18, pp. 352- 363 ,(1974) , 10.1147/RD.184.0352
T. E. Everhart, Simple Theory Concerning the Reflection of Electrons from Solids Journal of Applied Physics. ,vol. 31, pp. 1483- 1490 ,(1960) , 10.1063/1.1735868
G. D. Archard, Back Scattering of Electrons Journal of Applied Physics. ,vol. 32, pp. 1505- 1509 ,(1961) , 10.1063/1.1728385
Kenji Murata, Takayuki Matsukawa, Ryuichi Shimizu, Monte Carlo Calculations on Electron Scattering in a Solid Target Japanese Journal of Applied Physics. ,vol. 10, pp. 678- 686 ,(1971) , 10.1143/JJAP.10.678
V E Cosslett, R N Thomas, Multiple scattering of 5-30 keV electrons in evaporated metal films: I. Total transmission and angular distribution British Journal of Applied Physics. ,vol. 15, pp. 883- 907 ,(1964) , 10.1088/0508-3443/15/8/303
V E Cosslett, R N Thomas, Multiple scattering of 5 - 30 keV electrons in evaporated metal films III: Backscattering and absorption British Journal of Applied Physics. ,vol. 16, pp. 779- 796 ,(1965) , 10.1088/0508-3443/16/6/303
R. D. Heidenreich, L. F. Thompson, Direct observation of backscatter electron distributions on surfaces Applied Physics Letters. ,vol. 22, pp. 279- 281 ,(1973) , 10.1063/1.1654638
R F W Pease, THE DETERMINATION OF THE AREA OF EMISSION OF REFLECTED ELECTRONS IN A SCANNING ELECTRON MICROSCOPE. Journal of Scientific Instruments. ,vol. 42, pp. 158- 159 ,(1965) , 10.1088/0950-7671/42/3/309