A low-frequency cyclic loading stage for the SEM
作者： D L Davidson , A Nagy
DOI: 10.1088/0022-3735/11/3/010
关键词:
摘要: A cyclic-loading stage for the ETEC Corporation SEM is described. The uses servo-controlled electro-hydraulic loading with positive feedback Specimens are loaded symmetric to specimen centre line. Maximum load 4893 N, a maximum rate of 4 Hz. Resolution on about 50.0 nm static observation and 100.0 dynamic (TV rate) in secondary-electron mode. Observation may also be made using backscattered electrons channelling mode (channelling patterns contrast). motion during cyclic 15 mu m.
sci-hub.se 参考文章(1)
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