Refined Calibration Model for Improving the Orientation Precision of Electron Backscatter Diffraction Maps

摘要: For the precise determination of orientations in polycrystalline materials, electron backscatter diffraction (EBSD) requires a consistent calibration geometry scanning microscope (SEM). In present paper, variation projection center for Kikuchi patterns which are measured by EBSD is calibrated using projective transformation model SEM beam scan positions on sample. Based full pattern matching approach between simulated and experimental patterns, individual estimates determined subgrid map, from least-square fits to affine transformations can be obtained. Reference measurements single-crystalline silicon used quantify orientation errors result different models center.