Interferometric topological metrology with pre-established reference scale
作者： Lev Dulman
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摘要: A method is described that involves measuring a first set of interferometer fringe line disturbances against pre-determined measurement scale information in order to generate profiles describe the topography sample placed upon stage associated with interferometer. The map traces run over axis and stage. have recognized spacing between one another along second also adjusting relative position so as create disturbances. measuring, sample. interleaving description has resolution smaller than spacing.
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