作者: Satoshi Masuda , Yoshihiro Hara , Fumiaki Ishito , Akira Kosaka
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摘要: A base plate, a first slider and second are fit in one another to produce assemblage. The is caused move relative the plate along an X axis by actuator. moves unison with slider, also solely Y magnetic sensor unit provided magnet support so as face unit. disposed on lower of support. form position detection mechanism, which requires no electric wiring.