作者: John R. Andrews , Peter J. Nystrom
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摘要: Plural film layers are disposed on a substrate. Each layer has regions devoid of material, thus forming cavity openings. its cavities arranged to provide fluid coupling with adjacent or layers. The form traverse channel the top and bottom also one more lateral channels openings in layer. couples substrate that extends from surface other surfaces. A device such as dispenser, ejector, sensor bioprocessing is fluidly coupled plural channels. transport flow fluids.