Fundamental understanding of water vapor effect on SiOC evolution during pyrolysis

摘要: Abstract In this study, fundamental difference of polysiloxane derived SiOC from pyrolysis conditions with and without water vapor presence is evaluated composition microstructure points view. Based on the analysis, it can be that preferentially removes free carbon in matrix. Because less dominant carbon, SiC formation suppressed; some SiO 2 reduced to Si. After pyrolysis, nanodomains removed pores form HF etching highly porous microstructures. The graphitic layers a connecting network encapsulating other phases present: , Si, SiC; co-exists network. Without constraint matrix crystalline phases, exfoliate disorganized single layers.