Electronic and knock-on sputtering of solid rare gases by light keV ions
作者： Schou Jørgen , Ellegaard Ole , Sørensen Hans , Pedrys Roman
DOI: 10.1016/0168-583X(88)90688-X
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摘要: Abstract Electronic and knock-on sputtering of solid neon, argon krypton induced by 2–10 keV He + ions hydrogen has been studied means a quartz microbalance technique. The contributions from the two kinds are determined thickness dependence yield. For incident on conversion energy nuclear stopping to particle ejection is about six times as efficient corresponding electronically deposited energy.
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