Smoothness improvement of micrometer- and submicrometer-thick nanocrystalline diamond films produced by MWPECVD
作者： G. Cicala , V. Magaletti , G. S. Senesi , M. Tamborra
DOI: 10.1007/S11051-013-1549-X
关键词:
摘要: … The NCD films were grown on Si substrates treated by … of diamond powders of 40–60 μm or a combitanorial approach in a suspension of mixed diamond powders of 250 nm and 40–60 …
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