Vacuum package having vacuum-deposited local getter and its preparation

摘要: A vacuum package (20) is fabricated by providing a base (22) with device (32) affixed to the interior of (22), and lid (42). An activatable getter material (54) deposited onto preselected region either (48) (42) or that portion which does not have thereto. The at temperature such it activated during deposition. sealed (22). steps depositing sealing are conducted in an evacuated chamber without exposing atmosphere.