作者: W Ensinger , K Volz , B Enders
DOI: 10.1016/S0257-8972(00)01056-2
关键词:
摘要: Hollow workpieces such as cylinders are often required to exhibit better performance in wear and corrosion behaviour than the material workpiece is made of can offer. The problem be overcome when a protective coating deposited onto inner walls. However, walls by means physical vapour deposition techniques difficult because has enter hollow object under very flat angles wall, depending on ratio aperture diameter. This source located inside workpiece. possible sputter with ions performed. A target Energetic extracted from plasma which immersed accelerated towards workpiece, it impinge target. Thus, sputtered wall. At same time, growing film lead ion beam mixing effects. technique been tested different materials materials. films well adhering dense may act coatings against corrosion. shown for iron acetic acid, pitting aluminium sodium chloride solution, hydrogen embrittlement tantalum hydrochloric acid.