Study of the structural and electrical properties of silicon ion irradiated zirconium nitride thin films
作者： Waqar H. Shah , Yousaf Iqbal , Akif Safeen , Kashif Safeen , Gulzar Khan
DOI: 10.1142/S0217984918502810
关键词:
摘要: In this work, modification in structural and electrical properties of zirconium nitride (ZrN) thin films induced by silicon-ion irradiation is studied. ZrN are grown on glass substrate o...
harvard.edu
sci-hub.se 参考文章(34)
DongHo Kim, ChulMin Kim, EunHong Kim, YoungChul Shin, TaeGeun Kim, CheongHyun Roh, Cheol-Koo Hahn, Effect of the N2/(Ar+N2) Flow Ratio on the Synthesis of Zirconium Nitride Thin Films by DC Reactive Sputtering Journal of the Korean Physical Society. ,vol. 55, pp. 1149- 1152 ,(2009) , 10.3938/JKPS.55.1149
Shakil Khan, Ishaq Ahmed, Noaman Khalid, Mazhar Mehmood, Abdul Waheed, Maaza Malik, Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films Materials Science in Semiconductor Processing. ,vol. 39, pp. 530- 535 ,(2015) , 10.1016/J.MSSP.2015.05.062
K. Schwarz, A. R. Williams, J. J. Cuomo, J. H. E. Harper, and H. T. G. Hentzell, Zirconium nitride—a new material for Josephson junctions Physical Review B. ,vol. 32, pp. 8312- 8316 ,(1985) , 10.1103/PHYSREVB.32.8312
Yasushi Igarashi, Tetsuo Yamaji, Satoshi Nishikawa, A New Mechanism of Failure in Silicon p+/n Junction Induced by Diffusion Barrier Metals Japanese Journal of Applied Physics. ,vol. 29, pp. L2337- L2340 ,(1990) , 10.1143/JJAP.29.L2337
C Mitterer, PH Mayrhofer, W Waldhauser, Ergün Kelesoglu, P Losbichler, None, The influence of the ion bombardment on the optical properties of TiNx and ZrNx coatings Surface & Coatings Technology. pp. 230- 235 ,(1998) , 10.1016/S0257-8972(98)00651-3
H.M Benia, M Guemmaz, G Schmerber, A Mosser, J.-C Parlebas, Investigations on non-stoichiometric zirconium nitrides Applied Surface Science. ,vol. 200, pp. 231- 238 ,(2002) , 10.1016/S0169-4332(02)00925-X
A Janse Van Vuuren, VA Skuratov, VV Uglov, JH Neethling, SV Zlotski, None, Radiation tolerance of nanostructured ZrN coatings against swift heavy ion irradiation Journal of Nuclear Materials. ,vol. 442, pp. 507- 511 ,(2013) , 10.1016/J.JNUCMAT.2013.02.047
A. Cassinese, M. Iavarone, R. Vaglio, M. Grimsditch, S. Uran, Transport properties of ZrN superconducting films Physical Review B. ,vol. 62, pp. 13915- 13918 ,(2000) , 10.1103/PHYSREVB.62.13915
B. Karlsson, R.P. Shimshock, B.O. Seraphin, J.C. Haygarth, Optical properties of CVD-coated TiN, ZrN and HfN Solar Energy Materials. ,vol. 7, pp. 401- 411 ,(1983) , 10.1016/0165-1633(83)90013-8
V.V. Ison, A. Ranga Rao, V. Dutta, D.K. Avasthi, Effect of swift heavy ion irradiation on spray deposited CdX (X = S,Te) thin films Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 262, pp. 209- 214 ,(2007) , 10.1016/J.NIMB.2007.06.018