Chemically vapor deposited silicon carbide (SiC) for optical applications

摘要: Abstract In this paper we present important physical, thermal, mechanical, and optical properties of cubic (β) silicon carbide produced via a bulk chemical vapor deposition (CVD) process developed at CVD Incorporated. This SiC has been identified as the leading mirror material for high energy synchrotron radiation because its thermal conductivity, low expansion, polishability, reflectance in vacuum UV. However, it difficult to obtain quality, monolithic, mirrors large sizes, i.e., greater than 10–20 cm. Recently, Incorporated successful scaling an produce monolithic pieces up 60 cm (24 in.) diameter plates 76 (30 long by 46 (18 wide with thicknesses 13 mm (0.5 in.). The that make attractive applications, such optics, will be discussed.