Fabrication of integrated waveguide turning mirror on silicon-on-insulator
作者： Wenhui Wang , Yanzhe Tang , Yirong Yang , Tie Li , Yaming Wu
DOI: 10.1109/GROUP4.2004.1416715
关键词:
摘要: In this paper, based on the inductively coupled plasma (ICP) etching and KOH wet techniques, fabrication of integrated waveguide turning mirror (IWTMs) is presented.
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