Spatially resolved electron density distribution in an RF excited parallel plate plasma reactor by 1 mm microwave interferometry

摘要: The electron distribution in the argon plasma of a capacitively coupled parallel plate reactor (13.56 MHz) is measured with spatial resolution. line-of-sight integrated density obtained quasi-optical heterodyne interferometer operating at wavelength lambda = 1 mm. sequence planes between electrodes whereby radial determined each plane by Abel inversion. This allows us to generate an (r, z) mapping density. lateral resolution 6.5 mm focal region; phase amounts 7 × 10-5 period so that line 2 1014 m-2 represents lower limit applicability. distributions are compared measurements similar discharges other groups and probe midplane our discharge.