In Situ Characterizations of Thin-Film Nanostructures with Large-Range Direct Force Sensing
作者： Gilgueng Hwang , Juan Camilo Acosta , Hideki Hashimoto , Stephane Regnier
DOI: 10.1007/978-1-4419-9946-7_6
关键词:
摘要: Thin-film nanostructures from various materials have a great potential to further miniaturize the devices like nanoelectronics and micromachines. Recently semiconductor nanofilms, mono or multiple atomic layer carbon nanofilms been synthesized. However, precise electrical mechanical properties of these structures still need be characterized in more detail. In this chapter, we introduce large range force sensing tool that recently developed. Three-dimensional piezorsistive helical nanobelts (HNB) will described including their giant piezoresistivity. Their is calibrated by incorporating situ scanning electron microscope (SEM) tuning fork sensors. This characterization clearly revealed non-constant stiffnesses HNBs. Finally, as an application example, nanowires are The proposed system useful promising toward creating thin-film micro nanodevices.
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