Experimental investigation of a flowing fluid layer on metal surface roughness measurement and aberration correction using adaptive optics

作者: Yiin Kuen Fuh , Jia Ren Fan

DOI: 10.1007/S10043-013-0074-6

关键词:

摘要: The induced optical aberration of laser beam passing through a transparent flowing fluid layer on metal specimen is experimentally and empirical formula studied. proposed study presents an experimental investigation surface roughness measurement by combining probe laser-scattering phenomena adaptive optics (AO) for correction. In the absence AO correction scheme, flow velocity 0.278 m/s can severely degrade residual wavefront root mean square (RMS) error to 0.58 μm decrease scattered intensity. Real-time in closed-loop at sampling rate 8Hz reduce RMS 0.19 improve attenuation maximum relative estimated (Ra) less than 7.8% compared with stylus method. results show satisfactory presence using system.

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