Large arrays of chemo-mechanical nanoswitches for ultralow-power hydrogen sensing

摘要: A hydrogen sensor based on large arrays of nanoswitches in palladium (Pd) is presented. An individual nanoswitch realized by a suspended Pd/Ti/poly-Si trimorph electrode and fixed Pd/Ti bottom electrode, which are separated vertical nanoscopic gap approximately 10 nm size. In exposure, the volume expansion Pd results mechanical bending formation an electric contact. multitude arranged interconnected arrays. These enable dependence signal H2 concentration occurrence percolation effects. The combined use thin film, etching evaporation techniques allows for large-scale fabrication arbitrary topologies design, such as parallel linear chains or square lattices. temperature measurements presented discussed. reversible changes electrical resistance up to three orders magnitude obtained concentrations below 4% power consumption down few picowatts.