Multi-axis piezoelectric stress-sensing device, multi-axis piezoelectric stress-sensing device polarization method, and piezoelectric sensing detection system thereof
作者： Yung Ting , Yu-Heng Lin , Sheuan-Perng Lin
DOI:
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摘要: A multi-axis piezoelectric stress-sensing device, a device polarization method, and sensing detection system thereof are disclosed. The is used for machining tool. includes film, first electrode, second third fourth electrode. film has four corners. the electrode located at corners of least one to polarize another according direction.
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