Near-Cryogenic Machining of Polymethyl Methacrylate for Micromilling Tool Development

摘要: Abstract Micromilling tools with a diameter of 22 micrometers were developed to machine polymethyl methacrylate (PMMA) for micro systems applications. Due the small tool, and therefore its slow cutting speed, specific energy PMMA in near-brittle state was needed so micromilling feed could be estimated. To determine state, cooled liquid nitrogen machined diamond under normal machining conditions. Cutting forces surface finish measured from room temperature down −53°C. It found that as reduced, increased linearly approximately oxygen-free high conductivity copper. also became rougher decreased. Using these results, fabricated using focused ion beam machining. The used micromachine electroforming mol...