Thickness Control of Coatings by Means of Modulated IR Radiometry
作者： Francisco Macedo , Filipe Vaz , Ana C. Fernandes , Jean L. Nzodoum Fotsing , Juergen Gibkes
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摘要: Coatings prepared by reactive magnetron sputtering of approximately equal thermal transport properties but differing coating thicknesses are analyzed means non-contact non-destructive modulated IR radiometry. For the quantitative interpretation, measured wave signals calibrated, using for a homogenous opaque solid smooth surface. The relative minima inverse calibrated phase lag interpreted with respect to effective and thickness an solution two-layer problem. Based on measurements various coatings, limitations this method errors measurement discussed comparing microscopic measurements.
sci-hub.se 参考文章(8)
A. Nicolai, P. Börner, Minimization of the tritium content within the first wall of a Tokamak reactor Fusion Science and Technology. ,vol. 12, pp. 119- 136 ,(1987) , 10.13182/FST87-A25056
Francisco Macedo, Pedro Carvalho, Luís Cunha, Filipe Vaz, Jurgen Gibkes, Bruno K. Bein, Josef Pelzl, The Role of Modulated IR Radiometry Measurements in the Characterization of ZrON Thin Films Plasma Processes and Polymers. ,vol. 6, pp. S760- S766 ,(2009) , 10.1002/PPAP.200931802
M.E. Cunningham, K.L. Peddicord, Heat conduction in spheres packed in an infinite regular cubical array International Journal of Heat and Mass Transfer. ,vol. 24, pp. 1081- 1088 ,(1981) , 10.1016/0017-9310(81)90157-5
J. L. Nzodoum Fotsing, J. Gibkes, J. Pelzl, B. K. Bein, Extremum method: Inverse solution of the two-layer thermal wave problem Journal of Applied Physics. ,vol. 98, pp. 063522- ,(2005) , 10.1063/1.2058180
Jochen Bolte, Ji Gu, Bruno Bein, Background fluctuation limit of infrared detection of thermal waves at high temperatures High Temperatures-high Pressures. ,vol. 29, pp. 567- 579 ,(1997) , 10.1068/HTEC49
F. Macedo, F. Vaz, L. Rebouta, P. Carvalho, A. Haj-Daoud, K.H. Junge, J. Pelzl, B.K. Bein, Modulated IR radiometry of (TiSi)N thin films Vacuum. ,vol. 82, pp. 1457- 1460 ,(2008) , 10.1016/J.VACUUM.2008.03.066
H.G. Walther, Surface roughness influence on photothermal radiometry Applied Surface Science. ,vol. 193, pp. 156- 166 ,(2002) , 10.1016/S0169-4332(02)00257-X
Harald Petry, Online-Messung von Lackschichtdicken mit thermischen Wellen tm - Technisches Messen. ,vol. 65, pp. 396- 399 ,(1998) , 10.1524/TEME.1998.65.11.396