Design issues in ionized metal physical vapor deposition of copper
作者： Michael J. Grapperhaus , Zoran Krivokapic , Mark J. Kushner
DOI: 10.1063/1.366698
关键词:
摘要: … copper vapor lasers.The lack of a complete cross section set and gas phase rate coefficients … Therefore, within the FKS, the excited states of copper are lumped into an effective excited …
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