Investigation of Sol-Gel Technique to Prepare ITO Films Using Orthogonal Experiment
作者： Jie Liu , Jing Liu , Xu Wu , Bin Yang
DOI: 10.4028/WWW.SCIENTIFIC.NET/AMR.199-200.1804
关键词:
摘要: Transparent and conductive ITO thin films were prepared on quartz glasses by the sol-gel dip-coating method. This process is affected factors such as doping level of tin, number dip-coatings (layers or thickness film), withdrawal speed, annealing temperature time. The effects each factor at 5 levels properties has been studied optimized using method orthogonal experiments (L25(5)5). Quantitative analysis parameters in array design was performed results indicate that when sheet resistance transmittance are two targets, optimum experimental conditions are: mol ratio Sn: In: 1/10, dip-coatings: 8, speed: 200 mm/min, temperature: 550°C time: 70 minutes. To validate project, another experiment under above to determine best performance film. test show 125Ω/γ 86.2%, which meets expected aim.
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