Spectroscopic visualization of CH in methane/hydrogen plasmas for synthesis of carbonaceous materials and surface micromorphology

摘要: Abstract Plasma-enhanced chemical vapor deposition (PECVD) is among the promising processes to synthesize advanced materials. Carbon films of sp2 with different micro-structures (wall-like/pole-like) are attractive for battery electrodes and have been synthesized from methane + hydrogen plasmas. To clarify interaction between plasma a substrate target surface, an attempt visualize intermediate species CH was made in this work. Visible spectra (VIS-spectra) spontaneous optical emission plasmas were recorded by multi-channel spectrometer elucidate reaction mechanisms during process. The overall spectroscopic intensity methane-lean much higher than that methane-rich plasma. However, radical slightly methane lean one. In addition, two-dimensional images radicals generated captured using CCD camera fitted band-pass filter at 430 nm. It found negative bias voltage responsible turbostratic deposited films.