A Monolithic Three-Dimensional Ultrasonic Transducer Array for Medical Imaging

摘要: This paper presents the first monolithic multidirection-looking ultrasonic imager for minimally invasive medical diagnosis. In contrast to traditional planar imagers that can only view in one direction, this 3-D array is able multiple directions by using seven integrated on a hexagonal silicon prism. Each facet prism with 1- or 2-D capacitive-micromachined ultrasonic-transducer viewing specific direction. connected flexible dielectric membrane, which monolithically fabricated transducers. The membranes also support thin-film electrical interconnects between arrays different facets. substrate folded into after completion of transducer microfabrication process. With architecture, flip-chip bonded front-end electronic circuit will be manage all array. number bonding wires connection external electronics therefore reduced. Imager prisms, are ranging from 1 4 mm diameter and 2 length, positioned directions, have been prototyped. Preliminary testing shows transducers behaved consistently before assembly Applications include capsule ultrasound endoscope, intravascular ultrasound, other internal imaging needs.