Semiconductor manufacturing technology

摘要: 1. Introduction to the Semiconductor Industry. 2. Characteristics of Materials. 3. Device Technologies. 4. Silicon and Wafer Preparation. 5. Chemicals in Fabrication. 6. Contamination Controls Fabs. 7. Metrology Defect Inspection. 8. Gas Control Process Chambers. 9. IC Fabrication Overview. 10. Oxidation. 11. Deposition. 12. Metallization. 13. Photolithography: Vapor Prime Soft Bake. 14. Alignment Exposure. 15. Photoresist Development Advanced Lithography. 16. Etch. 17. Ion Implant. 18. Chemical Mechanical Planarization. 19. Test. 20. Assembly Packaging. Appendices. Glossary. Index.