Back reflector layer, method for forming it, and photovoltaic element using it
作者： Akiya Nakayama
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摘要: An object of the present invention is to provide a back reflector layer in texture structure with high reflectivity by preventing oxidation ground metal or alloy, and method for forming it. A further photovoltaic element excellent characteristics such as conversion efficiency, process fabricating The has alloy (hereinafter referred first metal), transparent oxide second metal, formed on metal. semiconductor junction layer. In element, an electron affinity 0.46 more eV smaller than that sputtering atmosphere comprising at least H₂O inert gas target having composition ratio being 1.06 1.2 times stoichiometric thereof.
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