Apparatus and Process for Depositing a Thin Layer of Resist on a Substrate

摘要: The present inventions relate to the formation of a thin polymer film on substrate. Apparatus is described for transforming solid resist into an aerosol small particles, electrostatically charging and depositing particles onto substrate, flowing continuous layer. further by heating form low viscosity liquid such as compatible with nebulization applying techniques jet or impact particle sizing aerosol. A method using ionized gas confer charge progression devices establish electric field directing flow charged associated apparatus results in high collection efficiency particles.