作者: Dirk Basting , Wolfgang Zschocke , Juergen Kleinschmidt , Uwe Stamm , Thomas Schröeder
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摘要: A line-narrowing module for a laser includes prism beam expander and grating preferably attached to heat sink. pressure-controlled enclosure filled with an inert gas seals the and/or other elements of module. The pressure in is adjusted tuning wavelength. Preferably, controlled by controlling flow through enclosure. pump may be used, or overpressure used. Alternatively, etalon rotatable