Effect of glass tempering on microstructure and functional properties of SnO2:F thin film prepared by atmosphere pressure chemical vapor deposition

摘要: Abstract The low-emission glass was prepared via depositing fluorine-doped tin oxide thin film on substrate by atmospheric pressure chemical vapor deposition method. as-deposited found to present a SnO2:F/SiCxOy/glass sandwich structure focused ion beam technique and transmission microscopic measurement. After tempering process at ~ 650 °C with varied periods, the electrical optical properties of SnO2:F remained stable for less than 10 min, but decreased dramatically when period exceeded which mainly due oxygen chemisorptions fluorine diffusion. It observed that films presented uniform polycrystalline nature cassiterite throughout process. study has therefore suggested appropriate conditions glass, provided critical guidance further energy-saving applications.