Sputter deposition of ultrahard coatings within the system Ti-B-C-N
作者： C. Mitterer , M. Rauter , P. Rödhammer
DOI: 10.1016/0257-8972(90)90146-4
关键词:
摘要: Abstract Ultrahard (hardness greater than 4000 HV 0.05) coatings derived from TiB2 were investigated as thin, wear-protective for cutting tools. Deposition methods based on non-reactive well reactive sputter deposition employing d.c. magnetron sputtering targets. Coatings deposited onto molybdenum, niobium and cemented carbide substrates. Very fine-columned films with an (001)-oriented phase are formed by means of reactively in Ar-N2-C3H8 atmospheres exhibit very fine-grained to fracture-amorphous structures. In the case Ar-N2 gas mixtures a hexagonal TiB2−xNy appears at low N2 flows. An increase flow results formation additional TiN. Reactive Ar-C3H8 leads existence mixed-phase structures phases TiC. Quarternary grown show multiphase consisting TiC Vickers microhardness measurements 3 - 5 μm thick inserts gave following maximum 0.05 values: Ti-B 4000; Ti-B-N 4800; Ti-B-C Ti-B-C-N 4200. Stresses found be compressive values up 4 GPa. The scratch tests indicate good adherence. Ti-B-coated have been tested turning aluminum alloys promising results.
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