Nanostructured ceramic platform for micromachined devices and device arrays

摘要: The present invention discloses a type of nanostructured ceramic platform for gas sensors and sensor arrays. These comprise micromachined anodic aluminum oxide films, which contains extremely high density (e.g., 1011 cm−2) nanoscale pores. Sensing materials deposited inside this self-organized network nanopores have ultra-high surface area nanometer grain structure, therefore enabling sensitivity. Refractory nature alumina enables the desired robustness, long lifetime stability in harsh environment. This can been used both chemical physical (humidity, temperature)