Microelectronic capacitance transducer for particle detection

作者: I. Evans , T. York

DOI: 10.1109/JSEN.2004.826741

关键词:

摘要: This paper describes the CMOS circuit design of a sensor for detecting changes of capacitance due, for instance, to the incidence of particles or bubbles on the electrodes. The …

参考文章(10)
Douglas R Holberg, Phillip E Allen, CMOS Analog Circuit Design ,(1987)
W.Q. Yang, T.A. York, New AC-based capacitance tomography system IEE Proceedings - Science, Measurement and Technology. ,vol. 146, pp. 47- 53 ,(1999) , 10.1049/IP-SMT:19990008
C Ghidini, D Marioli, E Sardini, A Taroni, A 15 ppm resolution measurement system for capacitance transducers Measurement Science and Technology. ,vol. 7, pp. 1787- 1792 ,(1996) , 10.1088/0957-0233/7/12/014
T.A. York, I.G. Evans, Z. Pokusevski, T. Dyakowski, Particle detection using an integrated capacitance sensor Sensors and Actuators A-physical. ,vol. 92, pp. 74- 79 ,(2001) , 10.1016/S0924-4247(01)00542-8
S. Pilla, J. A. Hamida, N. S. Sullivan, Very high sensitivity ac capacitance bridge for the dielectric study of molecular solids at low temperatures Review of Scientific Instruments. ,vol. 70, pp. 4055- 4058 ,(1999) , 10.1063/1.1150035
Trevor York, Status of electrical tomography in industrial applications Journal of Electronic Imaging. ,vol. 10, pp. 608- 619 ,(2001) , 10.1117/1.1377308
F.M.L. Van Der Goes, G.C.M. Meijer, A novel low-cost capacitive-sensor interface IEEE Transactions on Instrumentation and Measurement. ,vol. 45, pp. 536- 540 ,(1996) , 10.1109/19.492782
S.M. Huang, C.G. Xie, M.S. Beck, R. Thorn, D. Snowden, Design of sensor electronics for electrical capacitance tomography IEE Proceedings G Circuits, Devices and Systems. ,vol. 139, pp. 83- 88 ,(1992) , 10.1049/IP-G-2.1992.0014
H. E. A. van den Akker, P. A. van Halderen, B. Scarlett, W. K. Harteveld, R. F. Mudde, C. M. van den Bleek, A Fast Active Differentiator Capacitance Transducer for Electrical Capacitance Tomography ,(1999)
J.C. Chen, D. Sylvester, Chenming Hu, An on-chip, interconnect capacitance characterization method with sub-femto-farad resolution IEEE Transactions on Semiconductor Manufacturing. ,vol. 11, pp. 204- 210 ,(1998) , 10.1109/66.670160