Preparation of hard coatings by ion beam methods

摘要: Abstract The activated growth of surface coatings under the influence impinging ionized species has been investigated by beam techniques operating in high vacuum. A brief survey parameters using one or several bundles ions neutrals is given. Some results and problems are discussed connection with following processes: (1) nitriding iron low energy ion bombardment; (2) dual synthesis silicon nitride hard carbon; (3) preparation chromium-carbon carbon layers plating from organic vapours. It concluded that can contribute to a better understanding film at rates deposition. Moreover, methods offer interesting prospects for special layer structures, particularly unusual phases such as i-carbon.