作者: Loic Tous , Jean-Francois Lerat , Thierry Emeraud , Razvan Negru , Karim Huet
DOI: 10.1002/PIP.2362
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摘要: … In PV, nickel silicide formation by RTA has been … Nickel silicide formation by RTA has been reported either directly after nickel deposition 6, 7 or after completion of the full Ni/Cu/Ag (or …