Phase separation in magnetron sputtered superhard BCN thin films

摘要: Abstract The similar crystalline structure of diamond and cubic boron nitride suggests the synthesis superhard thin films containing boron, carbon nitrogen. BCN have been prepared by reactive r.f.-magnetron sputtering a hexagonal target in an argon/acetylene atmosphere constant pressure 2 × 10−2 mbar. A deposition temperature 600 °C leads to nearly hydrogen-free films. At flow ratio 0.05% C2H2/Ar, composition deposited is close B5CN3 as result energy dispersive X-ray (EDX) elastic recoil detection (ERD) measurements. By applying r.f.-substrate bias, ion has varied at ions film-forming particles 4. show maximum stress 110 eV due knock-on subplantation argon phase separation into carbon, regions diffraction investigations. Auger electron- infra-red spectroscopy.