Optical properties of multilayered porous silicon
作者： S Setzu , P Ferrand , R Romestain
DOI: 10.1016/S0921-5107(99)00261-5
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摘要: We present a short review of some optical devices based on multilayered porous silicon, which can be easily obtained by varying the formation current during etching process. These include Bragg reflectors and Fabry–Perot microcavities, adjusted from visible to near infrared. The interface roughness, tragic in case multilayers, is studied. It drastically reduced when changing electrolyte viscosity. high reflectivities this way are measured Cavity Ring–Down Spectroscopy. Problems occurring realising thin layers an efficient adjust precisely thicknesses constituting structure also presented. Finally we method calculation emission takes absorption into account able explain angular dependence luminescence.
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