Reusable template for creation of thin films; method of making and using template; and thin films produced from template

作者: David P. Nackashi , John Damiano , Stephen E. Mick

DOI:

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摘要: The present invention is directed generally to templates used in the creation of thin-film replicas, for example, thin films, such as carbon use specimen support electron-beam analysis. More specifically, novel reusable patterned templates, methodology making these made from methodologies, and reuse make films any type purpose, templates. A feature template its employment one or more zones discontinuity, undercuts, associated with patterns transferred into allow removal film without sacrificing structural integrity prevent at least re-use template.

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