Effect of iron catalyst thickness on vertically aligned carbon nanotube forest straightness for CNT-MEMS

摘要: This paper examines the effect of iron catalyst thickness on straightness growth carbon nanotubes (CNTs) for microelectromechanical systems fabricated using CNT-templated-microfabrication (CNT-M) process. SEM images samples grown various thicknesses show that both straight sidewalls and good edge definition are achieved an between 7 8 nm. Below this thickness, individual CNTs well aligned, but CNT forests formed into posts long walls not always straight. Above forest relatively straight, is poor, with significantly increased sidewall roughness. The proximity a device or feature to other regions also affects growth. By appropriate growth, by adding borders around features devices, designer can greatly improve CNT-MEMS.