Effect of SiO2 protective layer on the femtosecond laser-induced damage of HfO2/SiO2 multilayer high-reflective coatings
作者： Lei Yuan , Yuanan Zhao , Congjuan Wang , Hongbo He , Zhengxiu Fan
DOI: 10.1016/J.APSUSC.2006.07.041
关键词:
摘要: Two kinds of HfO2/SiO2 800 nm high-reflective (HR) coatings, with and without SiO2 protective layer were deposited by electron beam evaporation. Laser-induced damage thresholds (LIDT) measured for all samples femtosecond laser pulses. The surface morphologies the depth information observed Leica optical microscopy WYKO profiler, respectively. It is found that had no positive effect on improving LIDT HR coating. A simple model including conduction band production via multiphoton ionization impact used to explain this phenomenon. Theoretical calculations show occurs first in coating layer. relation two coatings calculation agrees experiment result. (c) 2006 Elsevier B.V. All rights reserved.
core.ac.uk
harvard.edu
elsevier.com
sci-hub.se 参考文章(14)
Vitali E. Gruzdev, Laser-induced ionization of solids: back to Keldysh Laser-Induced Damage in Optical Materials: 2004. ,vol. 5647, pp. 480- 492 ,(2005) , 10.1117/12.578469
J. Jasapara, A. V. V. Nampoothiri, W. Rudolph, D. Ristau, K. Starke, Femtosecond laser pulse induced breakdown in dielectric thin films Physical Review B. ,vol. 63, pp. 045117- ,(2001) , 10.1103/PHYSREVB.63.045117
J. Bonse, S. Baudach, W. Kautek, E. Welsch, J. Krüger, Femtosecond laser damage of a high reflecting mirror Thin Solid Films. ,vol. 408, pp. 297- 301 ,(2002) , 10.1016/S0040-6090(02)00074-3
T. Apostolova, Y. Hahn, Modeling of laser-induced breakdown in dielectrics with subpicosecond pulses Journal of Applied Physics. ,vol. 88, pp. 1024- 1034 ,(2000) , 10.1063/1.373772
M. Mero, J. Liu, W. Rudolph, D. Ristau, K. Starke, Scaling laws of femtosecond laser pulse induced breakdown in oxide films Physical Review B. ,vol. 71, pp. 115109- ,(2005) , 10.1103/PHYSREVB.71.115109
F. Rainer, W. H. Lowdermilk, D. Milam, T. Tuttle Hart, T. L. Lichtenstein, C. K. Carniglia, Scandium oxide coatings for high-power UV laser applications Applied Optics. ,vol. 21, pp. 3685- 3688 ,(1982) , 10.1364/AO.21.003685
M. Reichling, A. Bodemann, N. Kaiser, Defect induced laser damage in oxide multilayer coatings for 248nm Thin Solid Films. ,vol. 320, pp. 264- 279 ,(1998) , 10.1016/S0040-6090(97)00399-4
Meiqiong Zhan, Hongbo He, Yuanan Zhao, Guanglei Tian, Jianda Shao, Zhengxiu Fan, Overcoat dependence of laser-induced damage threshold of 355 nm HR coatings Applied Surface Science. ,vol. 252, pp. 2126- 2130 ,(2006) , 10.1016/J.APSUSC.2005.03.166
A. Kaiser, B. Rethfeld, M. Vicanek, G. Simon, Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses Physical Review B. ,vol. 61, pp. 11437- 11450 ,(2000) , 10.1103/PHYSREVB.61.11437
Haiyi Sun, Tianqing Jia, Xiaoxi Li, Chengbin Li, Donghai Feng, Shizhen Xu, Xiaochun Ge, Zhizhan Xu, Femtosecond laser-induced damage in reflector Applied Surface Science. ,vol. 252, pp. 5109- 5115 ,(2006) , 10.1016/J.APSUSC.2005.07.048