Electrode plate and process for production thereof
作者： Takashi Enomoto , Toshifumi Yoshioka , Masayuki Shimamune
DOI:
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摘要: An electrode plate suitable for use in an electro-optical device, such as a liquid crystal is formed by successively disposing on substrate first layer of transparent conductor film, second molybdenum or alloy, third aluminum and fourth alloy. The laminate structure patterned photolithographic process, followed removal the photoresist with peeling liquid, during which functions protective film al against to prevent formation defects.
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